• タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社

Sensor Devices

English (United Kingdom)
You are here:   HomeSensorsVacuum Measurement & ControlHPM-2002 Dual Sensor

HPM-2002 Series

Print PDF

hpm-2002

Dual Sensor Vacuum Gauges


 

The HPM-2002, dual sensor vacuum gauge, is a panel mount instrument with a micro-processor based display unit, gauge tube, and interconnecting cable. The two sensing elements (micro-machined Pirani and Piezoresistive sensor), provide accurate vacuum measurement over 7 decades of pressure from 1 X 10-4 to 1000 Torr.  An algorithm residing in the microprocessor ensures a seamless transition between the sensors.

The HPM-2002-OBE, dual sensor vacuum gauge, is a system mounted version of the gauge. The HPM-2002-OBE provides all of the performance features of the 2002 Series in a compact configuration with your choice of 12 signal output options.


Award Winning

Range : ​0.0001 Torr - 1000 Torr

(0.1 mTorr - 1000 Torr)

Dual Sensor - Pirani and Piezo vacuum sensor

Analog & Digital Outputs


 

HPM-2002-OBE

 

The R&D 100 award winning 2002 Series wide range, dual sensor vacuum gauge, is available in two mounting styles, panel mount or sensor mount.

 

 

Selection Chart

 

 

 

 

The Hastings History

 

In 1968, Hastings-Raydist (Teledyne-Hastings Instruments) was selected to provide the sensor to measure the vacuum in the moon rock box that was to accompany Apollo 11 on the first moon landing. The box, with the Hastings vacuum sensor installed, was sterilized and sealed under vacuum prior to lift off. It was opened on the moon, rock samples were put in the box and it was sealed again under moon vacuum. It was returned to earth and the vacuum was checked with the Hastings vacuum sensor, the seal had not been compromised.

 

Applications and Industries


Semiconductor Etch

Sputtering Chamber

Load Lock Systems

Process Control and Test

Plasma Coating

 



 

Specification

Bencht​​op / Panel Mount

HPM ​2002

Sensor Mount

HPM-2002 OBE

​Vacuum Range

​0.0001 - 1000 Torr

(0.1 m​Torr - 1000 Torr)

​0.0001 - 1000 Torr

(0.1 mTorr - 1000 Torr)

​​Accuracy

​+/- 1.5% of Reading 50 - 1000

+/- 20% of Reading 0.001 - 50 Torr

​+/- 1.5% of Reading 50 - 1000 Torr

+/- 20% of Reading 0.001 - 50 Torr

​Sensor Type: Direct Force (Gas Composition Independent)

​Piezoresistive: 32 - 1000 Torr

​​Piezoresistive: 32 - 1000 Torr

​S​ensor Type: Thermal Conductivity (Gas Composition Dependent) ​

​Micromachined Pirani: 0.0001 - 8 Torr

​​Micromachined Pirani: 0.0001 - 8 Torr

​Microprocessor calculated weighted average between 8 and 32 Torr

​​​Microprocessor calculated weighted average between 8 and 32 Torr

Sensor Part Numbers​

​(Sold Separately)

1/8" NPT (STD)

1/4" VCR

1.33 Conflat Flange

2.75 Conflat Flange

KF-16

KF-25

1/2" OD Smooth Tube

1/2" VCR

​(Included)

1/8" NPT (STD)

1/4" VCR

1.33 Conflat Flange

2.75 Conflat Flange

KF-16

KF-25

1/2" OD Smooth Tube

1/2" VCR

​Display

​3 Digit LED floating point mantissa plus 2 digit exponent

​4 Digit LED floating point

​Units

​Front Panel Selectable

Torr

mbar

Pa

​Specify when ordering

​Panel Cutout

​1/4" DIN

W - 3.75"

H - 3.75"

​Standard Output

​Single Channel

Linear per decade (1.0 - 4.5 VDC)

​Dual Channel

Linear (0 - 10 VDC)

 

 

Titan Technologies, K.K.

8-5-7-301 Minami-Senju, Arakawa-Ku, Tokyo 116-0003 Japan