HFM-D-301A / HFC-D-303A

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HFM-D-301A / HFC-D-303A mass flow instruments have flow ranges from 0-25 slm to 0-1000 slm; provide analog and digital outputs, and are constructed of stainless steel.   Easy, user friendly digital communications with windows based software interface available.  Available with a variety of elastomer seals for maximum flexibility.

 


 

​​± (0.5% of reading + 0.2% of full scale) Accuracy

 

Applications and Industries

 

Leak Testing

Thin Film Deposition

High Purity Gas Delivery

Thermal Flame Spray

Gas Blending

Pharmaceutical Process


HFM-D-301A Meter

HFC-D-303A Controller

​Range

(L): 0 - 25 slm to 0 - 300 slm (N2)
(H): 0 - 1000 slm to 0 - 3000 slm

(L): 0 - 25 slm to 0 - 300 slm (N2)
(H): 0 - 1000 slm to 0 - 3000 slm

Accuracy

+ (0.5% of reading + 0.2% of full scale)

+ (0.5% of reading + 0.2% of full scale)

​Repeatability

+ 0.15% of full scale

+ 0.15% of full scale

Maximum Working Pressure

500 PSIG (Optional 1000 PSIG)

​​500 PSIG (Optional 1000 PSIG)

Settling Time

Typically <1 seconds

Typically <1 - 2 seconds

Analog I/O (Standard)

​​0 - 5 VDC

​​0 - 5 VDC

Analog I/O (Optional)

0 - 10 VDC, 0-20 mA, 4 - 20 mA

0 - 10 VDC, 0-20 mA, 4 - 20 mA

Digital I/O (Standard)​

​RS-232, RS-485

​​​RS-232, RS-485

​Analog Connector

​15-pin subminiature D

​​​15-pin subminiature D

​Digital Connector

​Dual RJ-12

​​​Dual

J-12

Fittings

Surface Mount, Swagelok®, VCO, VCR, NPT​

Surface Mount, Swagelok®, VCO, VCR, NPT​​

Power Requirements

11 - 36 VDC @ 3.1 Watt (max), Unipolar or Bipolar (e.g. + 15, + 12 VDC)

11 - 36 VDC @ 3.1 Watt (max), Unipolar or Bipolar (e.g. + 15, + 12 VDC)

Wetted Materials

​316L SS, Nickel 200, 304 SS, 302 SS

​316L SS, Nickel 200, 304 SS, 302 SS, Kalrez® (Valve Seat)