HFM-D-300A / HFC-D-302A

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All Metal, Fast Response, Tight Accuracy! Mass flow techniques provide RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements.

HFM-D-300A / HFC-D-302A mass flow instruments have flow ranges from 0-5 sccm to 0-25 slm; use all metal seals, provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available.

Self-diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.

 


± (0.5% of reading + 0.2% of full scale) Accuracy

 

Applications and Industries

 

Leak Testing

Thin Film Deposition

High Purity Gas Delivery

Thermal Flame Spray

Gas Blending

Pharmaceutical Process

 

HFM-D-300A Meter

HFC-D-302A Controller

​Range

0 - 5 sccm to 0 - 25 slm (N2)

​0 - 5 sccm to 0 - 25 slm (N2)

Accuracy

+ (0.5% of reading + 0.2% of full scale)

+ (0.5% of reading + 0.2% of full scale)

​Repeatability

+ 0.15% of F.S.

+ 0.15% of F.S.

Maximum Working Pressure

500 PSIG (Optional 1000 PSIG)

​​500 PSIG (Optional 1000 PSIG)

Settling Time

Typically <1 seconds

​Typically <1 - 2 seconds

Analog I/O (Standard)

​​0 - 5 VDC

​​0 - 5 VDC

Analog I/O (Optional)

​​0 - 10 VDC, 0 - 20 mA, 4 - 20 mA

​​​​​0 - 10 VDC, 0 - 20 mA, 4 - 20 mA

Digital I/O (Standard)

​RS-232, RS-485

​​RS-232, RS-485

Analog Connector

15-pin subminiature D

​15-pin subminiature D

​Digital Connector

Dual RJ-12

Dual RJ-12

Power Requirements

​​11 - 36 VDC @ 3.1 Watt (max), Unipolar or Bipolar (e.g. +15 VDC, +12 VDC)

​​​11 - 36 VDC @ 6.7 Watt (max), Unipolar or Bipolar (e.g. +15 VDC, +12 VDC)

Wetted Materials

​316L SS, Nickel 200, 304 SS, 302 SS

​​316L SS, Nickel 200, 302 SS, 304 SS, Kalrez® (Valve Seat)