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  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
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You are here:   HomeSensorsMass Flow Controller & Meter300 Series

Mass Flow Controller 300 Series

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300 SERIES

Thermal Mass Flow Controller


 

 

 

HFM-300 / HFC-302

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All Metal, Fast Response, Low Flow Rates! The all metal HFM-300 / HFC-302 is Teledyne Hastings' metal sealed, fast response series of mass flow meters and controllers. Featuring reliability and stability, the 300 Series is chosen by OEM's for its fast response under a wide range of conditions.

The HFM-300 / HFC-302 meters and controllers have flow ranges from 0-5 sccm to flows of 0-25 slm; provide analog outputs, are constructed of stainless steel and have normally closed valves. The full scale range is specified by the end user.  A NIST traceable calibration certificate is standard. Corrosive gases and pressures up to 1000 psig are easily measured.  Cleaning for oxygen service is available.

 


Accuracy

± (0.75% of full scale 5 sccm to 10 slm)

± (1.00% of full scale 10 slm to 25 slm)

 

Applications and Industries

 

Leak Testing

Flame Spray

Gas Blending

R&D Process Flows

 

HFM-300 Meter

HFC-302 Controller

​Range 
(User Selectable)

0 - 10 sccm to 0 - 25 slm (N2)

​0 - 10 sccm to 0 - 25 slm (N2)

Accuracy

+ 0.75% of F.S. 5 sccm to 10 slm
+ 1.00% of F.S. 10 slm to 25 slm

+ 0.75% of F.S. 5 sccm to 10 slm
+ 1.00% of F.S. 10 slm to 25 slm

​Repeatability

+ 0.07% of full scale

+ 0.07% of full scale

Maximum Working Pressure

500 PSIG (Optional 1000 PSIG)

​​500 PSIG (Optional 1000 PSIG)

Analog I/O (Standard)

​​0 - 5 VDC

​​0 - 5 VDC

Analog I/O (Optional)

4​ - 20 mA I.O, 0 - 20 mA, 
0 - 5 VDC / 4 - 20 mA I/O

4​ - 20 mA I.O, 0 - 20 mA, 
0 - 5 VDC / 4 - 20 mA I/O

Fitting Options

Surface Mount, VCR®, VCO®, Swagelok®, Straight Thread

Surface Mount, VCR®, VCO®, Swagelok®, Straight Thread

​Connector

​15-pin subminiature D

​15-pin subminiature D

Power Requirements

​​+15 VDC @ 55 mA

​​+15 VDC @ 55 mA

Wetted Materials

​316L SS, Nickel 200, 302 SS

​316L SS, Nickel 200, 302 SS, Kalrez® (Valve Seat)

 

 

HFM-301 / HFC-303

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The HFM-301 / HFC-303 meters and controllers have flow ranges from 0-25 slm to flows of 0-1000 slm; provide analog outputs, are constructed of stainless steel and have normally closed valves. The full scale range is specified by the end user.  A NIST traceable calibration certificate is standard. With a choice of elastomers and high pressure options, the HFM-301 / HFC-303 services a wide variety of applications. Cleaning for oxygen service is available.

 


±1% of full scale Accuracy

 

Applications and Industries

 

Leak Testing

Flame Spray

Gas Blending

Semiconductor Process

Thin Film Deposition

 

HFM-301 Meter

HFC-303 Controller

​Range 
(User Selectable)

(L): 0 - 25 slm to 0 - 500 slm (N2)
(H): 0 - 500 slm to 0 - 1000 slm (N
2)

(L): 0 - 25 slm to 0 - 500 slm (N2)
(H): 0 - 500 slm to 0 - 1000 slm (N
2)

Accuracy

+ 1% of full scale

+ 1% of full scale​

​Repeatability

+ 0.7% of full scale

+ 0.7% of full scale

Maximum Working Pressure

500 PSIG (Optional 1500 PSIG)

500 PSIG ​(Optional 1000 PSIG)

Analog I/O (Standard)

​​0 - 5 VDC

​​0 - 5 VDC

Analog I/O (Optional)

4 - 20 mA I/O, 0 - 20 mA, 0 -5 VDC / 
4 - 20 mA I/O

4 - 20 mA I/O, 0 - 20 mA, 0 -5 VDC / 
4 - 20 mA I/O

​Seals

​Viton®, Kalrez, Buna-N, Neoprene

​​​Viton®, Kalrez, Buna-N, Neoprene

Fittings Option

Surface Mount, VCR®, VCO®, Swagelok®, Straight Thread, NPT

VCR®, VCO®, Swagelok®, Straight Thread, NPT

​Connector

​15-pin subminiature D

​​​15-pin subminiature D

Power Requirements

+ 15 VDC @ 55 mA

+ 15 VDC @ 150 mA

Wetted Materials

​316L SS, Nickel 200, 302 SS

316L SS, Nickel 200, 302 SS, Kalrez® (Valve Seat), Teflon

 

HFM-305 / HFC-307

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Fast Response! The HFM-305 / HFC-307 is Teledyne Hastings' fast response series of mass flow meters and controllers.  Featuring reliability and stability, the 300 Series is chosen for its fast response under a wide range of conditions.

The HFM-305 / HFC-307 meters and controllers have flow ranges from 0-1000 slm to flows of 0-2500 slm; provide analog outputs, are constructed of stainless steel and can be configured to have either normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a choice of elastomers and high pressure options, the HFM-305 / HFC-307 services a wide variety of applications. Cleaning for oxygen service is available.

 


 

± 1% of full scale Accuracy

 

Applications and Industries

 

Gas Blending

Research

Pollution Monitoring

R&D and Process Flows

 

HFM-305 Meter

HFC-307 Controller

​Range 
(User Selectable)

0 - 1000 slm to 0 - 2500 slm (N2)

0 - 1000 slm to 0 - 2500 slm (N2)

Accuracy

+ 1.0% of full scale

+ 1.0% of full scale

​Repeatability

+ 0.07% of full scale

+ 0.07% of full scale

Maximum Working Pressure

500 PSIG

​​500 PSIG

Analog I/O (Standard)

​​0 - 5 VDC

​​0 - 5 VDC

Analog I/O (Optional)

4​ - 20 mA I.O, 0 - 20 mA, 
0 - 5 VDC / 4 - 20 mA I/O

4​ - 20 mA I.O, 0 - 20 mA, 
0 - 5 VDC / 4 - 20 mA I/O

​Seals

​Viton®, Kalrez, Buna-N, Neoprene

Viton®, Kalrez, Buna-N, Neoprene​

Fitting Options

VCR®, VCO®, Swagelok®, Straight Thread, NPT

VCR®, VCO®, Swagelok®, Straight Thread

​Connector

​15-pin subminiature D

​15-pin subminiature D

Power Requirements

​​+15VDC @ 55 mA

​​+15VDC @ 150 mA​

Wetted Materials

​302 SS, 316 SS, Nickel 200

​​302 SS, 316 SS, Nickel 200, Viton®, Kalrez® (Valve Seat)

 

Titan Technologies, K.K.

8-5-7-301 Minami-Senju, Arakawa-Ku, Tokyo 116-0003 Japan